微观装置的制造及其处理技术
  • 一种校准用纳米几何量标准样板及其制备方法与流程
    本发明属于纳米测试领域中线宽和栅格标准样板的制备领域,具体涉及一种校准用纳米几何量标准样板及其制备方法。随着纳米技术的快速发展,纳米器件性能受几何尺寸的影响越来越显著。这个特点对纳米科技中测量和操作工具的特性和测量准确度提出了更高的要求,需要研制各种纳米样板并进行量值溯源和比对,以便对纳米...
  • 一种转印模式下的柔性传感器的制作方法
    本发明涉及柔性传感器制备与转印,可以制备任意衬底的柔性传感器,尤其是一种转印模式下的柔性传感器。随着电子产业的发展,柔性电子设备的需求日益增加,电子产品对重量轻、可拉伸、可转印于任意衬底的电子器件需求愈加明显。现有的柔性传感器中多采用在柔性基板上直接制备的方法,这些方法在一定程度上...
  • 一种空腔式压力传感器及其制备方法与流程
    本发明涉及压力传感器制备技术,尤其是一种灵敏度大、受力均匀及工艺方法简单的空腔式压力传感器及其制备方法。在如今各式传感器中,压力传感器是应用最广泛的一类。随着微机电系统(MicroElectroMechanicalSystem,MEMS)的发展,压力传感器越来越微型化,并且成本低、可...
  • 一种微米级金属件三维成型方法与流程
    本发明涉及微型机械,尤其涉及一种微米级金属件三维成型方法??萍挤⒄故沟酶呔任⑿∠低吃诘缱有畔?、精密机械、船舶海工、航空航天、生物医药和国防等各大领域的应用越来越广泛。因此,各种结构尤其是微米级三维结构的精密部件的加工装备与工艺技术,已经成为制约这一系列发展进程的瓶颈问题之一。其中...
  • 一种周期性V型微柱结构复合膜及其制备方法与应用与流程
    本发明涉及功能材料制备,具体涉及一种微观图案化材料及其复合膜的制备方法及应用,尤其涉及一种周期性V型微柱结构复合膜及其制备方法与应用。液体的定向输送在射流装置的无动力液体输送、制备各种微流控和单向阀装置等方面具有广泛的应用前景。已有研究人员通过制备表面不同的周期性微结构表面打破浸润...
  • MEMS器件及其制造方法与流程
    本公开涉及半导体器件制造领域,更具体地,涉及一种MEMS器件及其制造方法。目前,微机电系统(Micro-Electro-MechanicalSystem,MEMS)技术正在快速发展,在一般的微机电产品中,经常需要制作空腔结构,并在空腔上方进行覆膜形成结构层。在现有技术中,第一种常见的在空...
  • 微机电传感器封装结构及制造方法与流程
    本发明涉及微机电传感器,更具体地,涉及一种微机电传感器封装结构及制造方法。微机电传感器组件的封装具有不同功能。封装?;ぷ榧馐芑档暮突У幕肪秤跋?。此外,封装的结构类型确定了如何安装和接通所有组件。在此结构中特别重要的是壳体。在微机电传感器中,壳体承担着一部分传感器功能,起到传递...
  • 一种小型化抗高过载硅基微系统装置及其组装方法与流程
    本发明属于信息采集、数据处理和控制微系统集成领域,具体涉及一种小型化抗高过载硅基微系统装置及其组装方法?!尽砍S玫奈⑾低匙爸?,目前还停留在单一功能集成的样品芯片上,工艺结构还基于板级和接插件的拼装,主要使用已封装器件,有大量空间闲置。采用常规拼装工艺集成的微系统装置不具备抗高过载冲击的能力...
  • 一种基于MEMS技术的空气过滤薄膜及其制备方法与流程
    本发明涉及3D生物打印,具体涉及3D生物打印中打印材料的空气去除技术,尤其涉及一种基于MEMS技术的空气过滤薄膜及其制备方法。3D生物打印技术是集成生物学、材料学、医学、计算机学的多学科交叉融合技术,是一种以计算机三维模型为“图纸”,装配特制“生物墨水”,最终制造出人造器官和生物医...
  • 压力传感器及其封装方法与流程
    本发明涉及微电子机械系统领域,尤其涉及一种压力传感器及其封装方法。薄膜压力传感器具有稳定性好、精度高、可适用于恶劣环境等优点,广泛应用于国防、航空航天、工业生产和自动控制等各领域压力参数的测量。其中,绝压型薄膜压力传感器以绝压腔中的低气压作为传感器零位的参考气压。绝压腔封装的封装结构会直接...
  • 组合传感器的制作方法
    本实用新型涉及传感器,特别涉及一种组合传感器。将多个MEMS器件和ASIC器件集成封装时,需要形成多个GND(接地端),相比于单个MEMS器件和ASIC器件,相同封装面积下每个器件电路的接地面积变小。多个MEMS器件和ASIC器件封装形成组合传感器,在组合传感器受到静电作用时,接地...
  • 微型传感器组件和封装结构以及一种可穿戴电子设备的制作方法
    本实用新型涉及传感器,更具体地,本实用新型涉及一种微型传感器组件和封装结构以及一种电子手环。微机电系统(Micro-Electro-MechanicalSystem,MEMS)是一种微型器件,是指尺寸在几毫米甚至更小的高科技装置,其内部结构一般在微米甚至是纳米量级,是一个独立的智...
  • 自动解键合机的制作方法
    本发明涉及一种解键合机,尤其是一种自动解键合机,属于微纳米的。在MEMS领域,解键合是一种常用的加工方法,通常是将已经用胶粘在一起的衬底通过热滑移的方式,将两片衬底重新分离。解键合工艺过程中要始终保证上下吸盘平行,否则会导致衬底碎裂或不能完成衬底分离,目前的解键合机难以满足解键合工...
  • 五金件、封装结构及其制造方法与流程
    本发明涉及微机电传感器,更具体地,涉及一种五金件及使用该五金件的封装结构。MEMS组件的封装具有不同功能。封装?;ぷ榧馐芑档暮突У幕肪秤跋?。此外,封装或壳体的类型确定了在使用地点如何安装和接通所述组件。在MEMS传感器组件的情形中,位于外侧的壳体与位于MEMS传感器下方的五金...
  • 高灵敏度加速度传感器结构的制备方法与流程
    本发明属于微电子,特别是涉及高灵敏度加速度传感器结构的制备方法。硅基加速度传感器作为惯性传感器领域最为火热的MEMS检测器件之一,广泛应用于航空航天、汽车电子、可穿戴装置等消费类电子产品,尤其随着近几年VR/AR、智能汽车、物联网以及智慧城市的兴起,加速度传感器将继续发挥着越来越重...
  • 一种低成本高一致性MEMS压电换能器的制作方法与流程
    本发明涉及超声换能器,具体涉及一种低成本高一致性MEMS压电换能器的制作方法。超声波具有方向性好,穿透能力强,易于获得较集中的声能,在水中传播距离远等特点??捎糜诓饩?、测速、清洗、焊接、碎石等。在医学、军事、工业、农业上有很多的应用。在超声系统中,实现声电转换的器件即为换能器(Ul...
  • 基于电热预加载具有准零刚度特性的MEMS微重力传感器芯片的制作方法
    本发明涉及加速度传感器,特别涉及一种基于电热预加载具有准零刚度特性的MEMS微重力传感器芯片。地球重力场蕴含着丰富的物理信息,随着人类生产活动逐步深入地下,重力加速度的测量环境及指标变得更加严苛,人们对于高分辨率、高精度的微重力加速度检测技术的需求愈发急切。随着制造技术的迭代发展,...
  • 一种三轴磁传感器及其制备方法与流程
    本发明涉及半导体制造,尤其涉及一种三轴磁传感器及其制备方法。微机电系统(Micro-Electro-Mechanical-System,MEMS),是将微电子技术与机械工程融合在一起的一种新技术。MEMS器件,相对于传统的半导体器件,具有多种优势,例如体积小,成本低,集成化程度高,...
  • 微传感器及其制备方法与流程
    本发明属于半导体结构,特别是涉及一种微传感器及其制备方法。随着微机械加工技术的不断发展,不同功能的MEMS器件在各个领域都得到了广泛应用,其中微加热器在气体传感器、微热量计、气体流量计、红外光源等等方面都得到了广泛应用。其中基于MEMS微加热器的气体传感器具有体积小、功耗低、可批量...
  • 具有机械去耦的微集成封装MEMS传感器及其制造方法与流程
    本发明涉及一种具有机械去耦的微集成封装MEMS传感器及其制造方法。如已知的那样,使用MEMS(微机电系统)技术获得的微集成传感器由于它们不断提高的可靠性、低成本和非常小尺寸而广泛用于市场上。例如,美国专利No.6,131,466描述了一种压阻类型的微集成MEMS压力传感器及其制造方...
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